Business

Saehan Nanotech is a manufacturer of semiconductor and display equipment.

 

Saehan Nanotech

We control the entire process, from product development to design, production, equipment training, and after-sales service.

 

 

Our machines produce consumable parts, which are components used for the semiconductor etching process. The etching process is a step of leaving only the necessary pattern by removing the lower film. In the etching process, high-density plasma gas is utilized, and parts such as electrodes and rings are used to distribute the gas uniformly.

Electrode, Ring, Ingot

 

As you can see in the picture below, there is an electrode on top of the wafer, and gas passes through the small holes in the electrodes.

 

Etching process and silicon electrode

 

The electrode is installed in the etching process equipment. Plasma is uniformly distributed on the wafer surface by sending gas between the micro holes of the electrode. The ring is installed around the wafer. The ring keeps the plasma concentration and etching degree constant. 

 

Electrodes and rings are produced by processing silicon ingots. Our equipment is mainly used for cutting ingots and drilling tiny holes in electrodes. As semiconductor yield becomes more critical, the precision level of these consumable parts is also increasingly demanded.

 

 

Micro drilling machine for silicon electrode small hole drilling

 

 

Multi-wire sawing machine for silicon ingot slicing

 

 

Grinding Center Machine for cutting and grinding